Condition assessment and fault prognostics of microelectromechanical systems
نویسندگان
چکیده
منابع مشابه
Condition assessment and fault prognostics of microelectromechanical systems
Microelectromechanical systems (MEMS) are used in different applications such as automotive, biomedical, aerospace and communication technologies. They create new functionalities and contribute to miniaturize the systems and reduce their costs. However, the reliability of MEMS is one of their major concerns. They suffer from different failure mechanisms which impact their performance, reduce th...
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ژورنال
عنوان ژورنال: Microelectronics Reliability
سال: 2014
ISSN: 0026-2714
DOI: 10.1016/j.microrel.2013.09.013